1 General provisions
1.0.1 This code is prepared with a view to standardize the construction management of installation engineering of the pure water system of electronic industry, unify the quality acceptance of engineering construction, and ensure the engineering quality.
1.0.2 This code is applicable to the installation and acceptance of new construction, extension and renovation of the pure water system of electronic industry.
1.0.3 Construction of the pure water system shall be operated according to the approved construction drawings, related technical standards and technical contents stipulated in the contract, and the amendment of construction drawings shall have notification from design unit or technical approval visa.
1.0.4 In addition to the requirements stipulated in this code, those stipulated in the current relevant standards of the nation shall be complied with in the installation and acceptance of pure water system engineering.
2 Terms and abbreviations
2.1 Terms
2.1.1
pure water system of electronic industry
preparation of pure water and ultra-pure water for electronic industry production, it is the general designation of system composed of preparation equipment, pipes, electrical and corresponding instruments etc.
2.1.2
multi media filter
device that under certain pressure, the water can pass through the multi-layer medium filled in the equipment, intercepting the impurities such as suspension and floc in the water through the pores between the media.
2.1.3
active carbon filter
device that belong to pressure filtering equipment, which filled with activated carbon with larger surface area, physical adsorption and chemical adsorption, remove organic matter, residual chlorine, chromaticity and odor in water with its comprehensive adsorption, etc.
2.1.4
reverse osmosis unit
equipment made of membranes and components which under the impressed pressure, using a semipermeable membrane to send water molecules and other material from high concentration side to low concentration side, thus, most of the dissolved solids（salts）, organic compounds, colloids and particles are removed.
2.1.5
electrode ionization
it is the general designation of equipments that by utilizing the action of electric field, the anion and cation in water can migrate directionally and selectively pass through the anion exchange membrane and the cation exchange membrane, forming pure water and concentrated water compartments between the anion and cation exchange membrane respectively, simultaneously, utilize electrolysis Hydrogen ions and hydroxide ions produced by water continuously regenerate the failed working layer resin, thus continuously removing ions in water without specially regeneration demineralizer.
2.1.6
mixed bed
mixed bed, also called mixed ion exchange tower, is a device for producing high purity water by mixing anion and cation exchange resins in a certain proportion in the same equipment and exchanging and removing various anions and cations in water.
2.1.7
ultraviolet sterilization
device for killing live bacteria in water by ultraviolet irradiation with wavelength of 254nm.
2.1.8
ultraviolet TOC removal
device for degradation of total organic carbon（TOC）in water by ultraviolet irradiation with wavelength of 185nm.
2.1.9
membrane degasifier
device for reducing volatile substances in water by membrane separation technology.
2.1.10
ultrafiltration
membrane separation device that under the external pressure, utilizing the asymmetric membrane to remove polymer materials or colloids with a relative molecular weights between 6000 and 500000 in water.
2.1.11
resistivity
the resistance value of a water column with a section area of 1cm2 and a length of 1cm at 25C, and MΩ·cm is the frequently-used unit of resistivity.The higher the purity of water, the greater the resistivity.
2.1.12
particle
the number of particle that the size is larger than or equal to a certain diameter in a unit volume of water.
2.1.13
TOC total organic carbon
amount of organic matter in water is expressed in terms of the amount of carbon in the main element of organic matter.
2.1.14
residual chlorine
chlorine remains in water after contact with chlorine disinfectant for a certain period of time.
2.1.15
silt density index
blocking rate of a certain volume of water sample passes through a specific microporous membrane filter in standard pressure and standard time period.Usually the calculated period adopted is 15min, corresponding siltation index is called SDI15.
3 Installation of equipments
3.1 General requirements
3.1.1 The construction site shall have the corresponding construction management system, quality management system, quality control and inspection system, and shall have the approved technical documents of construction organization design（construction scheme）.
3.1.2 The installation of equipment shall be operated according to the prescribed procedures, and the relevant processes shall be handover and test, and a written record shall be formed.The construction of the next procedure shall not be operated without the inspection of the previous procedure.
3.1.3
All document and attachment with the equipment such as packing list of the main equipment, product quality certificate, performance test report and product manual shall be complete, and the imported equipment shall also be certified as qualified.All openings of the equipment must be well sealed, and acceptance records shall be formed after acceptance.
3.1.4 Before the equipment is in place, the equipment foundation shall be checked and accepted, such as the outline dimension, coordinate position, elevation and flatness.The equipment foundation shall meet the design requirements.
3.1.5
Before installation, the epoxy coating, FRP coating or the bottom of the coating shall be completed and the curing period shall be achieved.
3.1.6 The handling and lifting of the equipment shall meet the relevant requirements of the product, and effective protective measures shall be made for equipment.
3.1.7 Sealing of equipment connection shall not be opened before interface piping.
3.1.8 After the equipment is in place, it shall be clearly marked, indicating the condition of the equipment and the matters needing attention, and the fragile parts of the equipment shall be protected by soft package.
3.1.9 L or S type pipeline of stainless steel shall be installed in the import and export of UV and TOCUV.
3.1.10 In addition to the requirements stipulated in this code, those stipulated in the current nation standard GB50231 General Code for Construction and Acceptance of Mechanical Equipment Installation Engineering shall be complied with in the equipment installation of pure water system of electronic industry.
Contents
1 General Provisions
2 Terminologies and Abbreviations
2.1 Terminologies
2.2 Abbreviations
3 Installation of Equipment
3.1 General Requirements
3.2 Installation of Non-metallic Equipment
3.3 Installation of Carbon Steel Equipment
3.4 Installation of Stainless Steel Equipment
3.5 Installation of Pump and Fan
3.6 Installation of Skid
3.7 Installation of Other Equipment
4 Pipe Engineering
4.1 General Requirements
4.2 Installation of Rack
4.3 Installation of Carbon Steel Pipe
4.4 Installation of Stainless Steel Pipe
4.5 Installation of PP Pipe
4.6 Installation of PVC Pipe
4.7 Installation of Cl-PVC Pipe
4.8 Installation of PVDF Pipe
5 Electric Engineering
5.1 General Requirements
5.2 Electric Rack and Pipe & Cable
5.3 Installation of Electric Equipment
5.4 Installation of Instrument
6 System Commissioning and Test
6.1 General Requirements
6.2 System Commissioning
6.3 System Test
7 Engineering Acceptance
7.1 General Requirements
7.2 Completion Acceptance
7.3 Comprehensive Performance Acceptance
Appendix A Main Test Items of Pure Water System
Appendix B Test method of Major Indexes of Pure Water System
Appendix C Quality Acceptance Record Table
Explanation of Wording in This Code
List of Quoted Standards
